IEEE transactions on semiconductor manufacturing [electronic resource] : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Contributor(s): Material type: Continuing resourceContinuing resourcePublication details: New York, N.Y. : Institute of Electrical and Electronics EngineersISSN:
  • 1558-2345
Other title:
  • Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing
  • Transactions on semiconductor manufacturing
  • Semiconductor manufacturing
Uniform titles:
  • IEEE transactions on semiconductor manufacturing (Online)
Subject(s): Genre/Form: Additional physical formats: IEEE transactions on semiconductor manufacturingDDC classification:
  • 621 13
  • 621.3815/2 19
LOC classification:
  • ISSN RECORD
  • TK7836 .I39
Online resources: Available additional physical forms:
  • Also available in print.
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Description based on print version record.

Latest issue consulted: Vol. 18, issue 3 (2005) (viewed IEEE website Sept. 21, 2005).

Access restricted to authorized UMS staff, students and school

Text (electronic journal).

Also available in print.

Mode of access: World Wide Web.

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