Micromanufacturing : international assessment of research and development / K. F. Ehmann ... [et al.]
Material type:
- 1402059485 (hd.bd.)
- 9781402059483 (hd.bd.)
Item type | Current library | Home library | Call number | Copy number | Status | Date due | Barcode | |
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MAIN LIBRARY Main Library General Collection | MAIN LIBRARY Main Library General Collection | TJ1191.5 . M5525 2007 (Browse shelf(Opens below)) | 1 | Available | 1000257290 |
"WTEC"--Cover.
Includes bibliographical references.
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.